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Tel：86-755-23765416
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CaTiO BATTERY SOLUTIONS

LOCATION：HOME > SOLUTIONS > CaTiO BATTERY SOLUTIONS
PVD equipment

Parameter

Project

Specification

Substrate size

450mm*650mm

Thickness uniformity

±5%（Edge 8mm inside）

Equipment size

6800mm*3200mm*2100mm

Picture

                   上下料腔Δ          预热腔Δ               缓冲腔Δ       PVD空穴层镀膜腔Δ        PVD ITO镀膜腔Δ           缓冲腔Δ 

 
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Add：701, Unit 2, Building 2, Hongchuang Technology Center, Xikeng Community, Fucheng Street, Longhua District, Shenzhen
101, Building 2, No. 13, Shalingbian Road, Tangxia Town, Dongguan City, Guangdong Province
Tel：86-755-23765416      Fax：86-755-27189463
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